Details

The S-TRC series is a multi-measurement device that can be implemented in a combination of functions required for a variety of measurement needs. It contains following functions.

Key Features

• Multi-Measurement Mode
• Measure reflection, transmission, color and thin film thickness simultaneously per measurement point
• Multi-point measurement mode
• Depending on your options, you can measure reflection, permeation, color, and thin film thickness at up to four measurement points.
• Uniformity Analysis by Measurement Point Providing n, k data for various substances Measurement result report Ethernet Communication Interface
• Fast data communication and reliable communication overcoming distance Additional features for in-line processes
• External trigger function for measurement synchronization
• Real-time monitoring of specific wavelengths in the mass production process Recording and Alarm Capabilities

Details

Developed by Wonwoo Systems Co., Ltd., EP-202J provides end-point detection (EPD) such as etching and deposition by monitoring and analyzing plasma gas spectroscopy in real time during production processes such as semiconductors, LCDs, and LEDs using Plasma.

Key Features

• Select a suitable spectrometer depending on the spectral properties of the material (wavelength range, spectral intensity, pixelation)
• Up to 8 analysis channels can be scaled per system
• USB 2.0 interface for communication with monitoring PCs
• Remote remote control over Ethernet network
• Peripheral controller and digital and analogcommunication input/output capabilities
• Optimal detection conditions using EP software EPD parameter data contained in the system